Abstract:Inductively coupled plasma emission spectrometry (ICP-OES) and inductively coupled plasma mass spectrometry (ICP-MS) analysis techniques are both inorganic element analysis techniques with ICP as the excitation source or ion source. It has similarities in instrument operation, preparation of standard solution and injection method, and is a powerful tool for the determination of inorganic elements. The solution injection method is adopted by the standard analysis methods in various fields, and the ICP-OES and ICP-MS analysis methods have been rapidly developed in the standardization aspect. This paper describes the current status of ICP-OES instruments, the development of analytical functions and the progress in their application. Review on the development of ICP-MS analysis technology, the progress of quadrupole inductively coupled plasma mass spectrometry (ICP-QMS) instrument, and the application of nanoparticle analysis, biochemistry, morphological analysis, geochronology and other fields, etc.