Abstract:Inductively coupled plasma mass spectrometry is a highly sensitive analytical technology, which is widely used in elemental analysis in geology, environment, biology, medicine, semiconductors and other fields. The research, development, manufacturing and application of ICP-MS instruments and equipment involve multidisciplinary and multi-field science and technology such as electromagnetism, electricity, chemistry, machinery, materials, vacuum, etc., this paper introduces the scientific principles, technical systems, and factors considered for product engineering and application development involved in ICP-MS, and finally shows that product development should systematically consider the interrelationship between science, technology, products and applications, and puts forward the ideas and development directions of ICP-MS technology innovation.